| 摘要 |
The present invention relates to an exhaust pipe connecting structure. The exhaust pipe connecting structure according to an embodiment of the present invention comprises: a first pipe having a first flange where first coupling units are formed; a second pipe having a second flange where second coupling units are formed; and a valve assembly connecting the first pipe with the second pipe, having through-holes corresponding to the first and second coupling units, and controlling a vacuum pressure provided to a vacuum chamber. The first and second pipes have at least one side alignment grooves in the first flange and second flange, respectively to align the first coupling units and second coupling units. The valve assembly includes an alignment member aligned with the side alignment grooves to make the first coupling units and second coupling units match with the through-holes. |
