发明名称 JOSEPHSON JUNCTION ELEMENT AND FABRICATION THEREOF
摘要 PURPOSE:To reduce cost by forming a supeconductive layer of a high temperature oxide supeconductor. CONSTITUTION:The Josephson junction element is formed of a high temperature oxide superconductor and a barrier layer is formed of a ferroelectric doped with a specific element by 0.991-5wt.%. In the Josephson junction element 10, an YBa2Cu3O7-x film 2 is laminated, as a high temperature oxide superconductor, on an SrTiO3 (100) single crystal substrate 1 and patterned in planar dumbbell shape. A groove 2a of length lambda is made at the bridge part thereof while extending to the substrate 1. An Nb doped ferroelectric oxide SrTiO3 film 3 is formed in planar dumbbell shape on the bridge part of the YBa2Cu3O7-x film 2 while intersecting the film 2 perpendicularly and filling the groove 2a. This constitution realizes a Josephson junction element having enhanced characteristics in which the critical current, normal conductive tunnel resistance, etc., can be controlled.
申请公布号 JPH06334231(A) 申请公布日期 1994.12.02
申请号 JP19930121202 申请日期 1993.05.24
申请人 SHARP CORP 发明人 MIZUNO YUJI;OSADA MASAYA;NOJIMA HIDEO;KOBA MASAYOSHI
分类号 H01L39/24;(IPC1-7):H01L39/24 主分类号 H01L39/24
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