PRODUCTION OF PLANAR OPTICAL WAVEGUIDE

摘要

PURPOSE:To provide the process for production of the planar optical waveguide consisting of uniform coating films with lessened scattering loss without generating solvent stress cracking and redissolving at the time of lamination of the thick films of org. polymers. CONSTITUTION:A first laminating stage for preparing a raw material soln. 10 dissolved with the first org. polymer material for a clad layer and a raw material soln. 20 dissolved with the second org. polymer material for a core layer, immersing a substrate 4 into the raw material soln. 10 for the clad layer and drying the substrate is executed. A second laminating stage for immersing the substrate 4 into the raw material soln. 20 for the core layer and drying the substrate is then executed. The immersion is executed respectively plural times and the turn over of the bottom end 41 and top end 42 of the substrate 4 is executed during this time. The coating films are held in a vertical direction and the drying is executed by suppressing the evaporation rate of the solvent from the coating films is executed at the time of the drying.