| 摘要 |
The purpose of the present invention is to decrease pressure to predetermined pressure inside a vacuum process chamber not to coagulate moisture. Provided is a vacuum exhausting method having a vacuum process chamber which comprises: a first process of opening a valve for connecting an exhausting apparatus with the vacuum process chamber, and exhausting vacuum inside the vacuum process chamber during a first predetermined period of time by the exhausting apparatus; and a second process of closing the valve after the first process, and accelerating to increase pressure inside the vacuum process chamber (11) by leaving the valve closed for a second predetermined period of time, thereby decreasing the pressure inside the vacuum process chamber until the pressure becomes 6.7-13.3x10^2 Pa without coagulating moisture inside the vacuum process chamber. |
