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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH06334123(A)
申请公布日期
1994.12.02
申请号
JP19930116839
申请日期
1993.05.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
KONO KENJI
分类号
G01R31/26;G01R31/28;G11C29/06;H01L21/66;H01L21/822;H01L27/04;(IPC1-7):H01L27/04
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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