| 摘要 |
<p>PURPOSE:To obtain a visual inspection apparatus in which the number of photodetectors is reduced and which is low-cost in the visual inspection apparatus which can perform a plurality of kinds of inspections such as a transmitted-light inspection, a scattered-light inspection, a mirror-reflected-light inspection and the like. CONSTITUTION:A visual inspection apparatus which can perform a transmitted-light inspection, a scattered-light inspection and a mirror-reflected-light inspection is provided with an object-to- be-inspected table 10 on which an object M to be inspected is placed and which can move the object M to be inspected with reference to an inspection position P so as to be capable of being scanned, with a light source A 20 which is arranged in an obliquely upper position with reference to the inspection position P, with a light source B 22 which is arranged in a position just under the inspection position P, with a photodetector A 30 which is arranged in a position just above the inspection position P and with a photodetector B 32 which is arranged in a position in an obliquely upper position symmetric with the light source A 20 with reference to the inspection position P. Then, the visual inspection apparatus is constituted in such a way that the scattered-light inspection is performed by the light-source A 20 and the photodetector A 30, that the transmitted-light inspection is performed by the light source B 22 and the photodetector A 30 and that the mirror-reflected-light inspection is performed by the light source A 20 and the photodetector B 32.</p> |
