FORMATION OF CONTACT HOLE,申请号JP19930124323-传众专利搜索

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发明名称	FORMATION OF CONTACT HOLE
摘要
申请公布号	JPH06333882(A)	申请公布日期	1994.12.02
申请号	JP19930124323	申请日期	1993.05.26
申请人	SANYO ELECTRIC CO LTD	发明人	SAKAMURA SHOJI
分类号	H01L21/28;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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