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发明名称
Fremgangsmåte for bevegelse av et materialuttaksverktöy med lave verktöyakselerasjoner
摘要
申请公布号
NO944614(D0)
申请公布日期
1994.12.01
申请号
NO19940004614
申请日期
1994.12.01
申请人
HUGHES AIRCRAFT CO
发明人
BOLLINGER, LYNN DAVID
分类号
B23Q15/00;B24B49/02;G05B19/416;H01L21/302;H01L21/304;H01L21/3065;(IPC1-7):H01L;B23H
主分类号
B23Q15/00
代理机构
代理人
主权项
地址
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