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发明名称
PROBE CARD
摘要
申请公布号
JPH06334006(A)
申请公布日期
1994.12.02
申请号
JP19930141578
申请日期
1993.05.20
申请人
FURETSUSHIYU QUEST CORP;INOTETSUKU KK
发明人
ETSUCHI DAN HIGINZU;PIITO NOOMINTON
分类号
G01R1/073;G01R31/26;H01L21/66;(IPC1-7):H01L21/66
主分类号
G01R1/073
代理机构
代理人
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