METHOD FOR REDUCING THE CONTENT OF NITROGEN OF SILICON CARBIDE POWDER, AND SILICON CARBIDE SINGLE CRYSTAL THEREOF

摘要

The present invention relates to a method for reducing a nitrogen content of silicon carbide powder and a silicon carbide single crystal prepared thereby. According to the present invention, a nitrogen content of silicon carbide powder can be reduced to be 100 ppm or less, and obtaining of a high resistance silicon carbide single crystal of 10^3 ohm-cm or more is possible when a silicon carbide single crystal grows using the same.