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发明名称
RESIST COATER
摘要
申请公布号
JPH06326017(A)
申请公布日期
1994.11.25
申请号
JP19930132599
申请日期
1993.05.10
申请人
TOKYO ELECTRON LTD;TOKYO ELECTRON KYUSHU KK
发明人
TSUNEMATSU KUNIE
分类号
G03F7/16;H01L21/027;H01L21/30;(IPC1-7):H01L21/027
主分类号
G03F7/16
代理机构
代理人
主权项
地址
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