RELEASING DEVICE FOR ELECTROSTATICALLY ATTRACTED MATERIAL

摘要

PURPOSE:To provide a releasing device for an electrostatically attracted material, which positively eliminates residual electric change on the holding surface for an attracted material of an electrostatic chuck on the attracted material and safely releases the attracted material without the occurrence of the leaping of the attracted material. CONSTITUTION:An electrostatic chuck 10 attracts and holds a material to be attracted by electrostatic force. Conductive supporting pins 28 are made to penetrate the electrostatic chuck 10 and supports an attracted material 5 in a horizontal state with respect to a holding surface 35 for an attracted material of the electrostatic chuck. The pins 28 are driven up and down and electrically grounded. Conductive rubbers 30 are bonded to the supporting pins 28 with a conductive bonding agent 29 and supports the attracted material 5 through surface contact. These parts are provided in this constitution.