| 摘要 |
PURPOSE: To obtain a soft magnetic material having excellent magnetic permeability, coercive force and saturation magnetism by using a magnetic material for a magnetic head forming the soft magnetic material which is composed of a mixture of a prescribed compsn. and has a prescribed thickness. CONSTITUTION: An FeRhGaSi thin film 10 is formed to about 2μm thickness on a ceramic substrate 12 by a DC sputtering technique and thereafter, the film 10 is annealed at every 20 to 50 deg.C between 350 to 600 deg.C in a magnetic field of 150Oe, by which the soft magnetic characteristics are obtd. A protective layer 14 of SiO2 is deposited to about 0.1μm thickness by a high-frequency sputtering method prior to annealing to protect the alloy film 10 against oxidation. The allay film 10 is formed to 0.1 to 10μm thickness by the mixture composed of the formula Fei Rhj Gak Sil . In the formula of the soft magnetic material, i, j, i, l denotes the density at atomic % and the respective densities are 69.0<=i<=80.0, 1.0<=k<=6.0, 4.0<=k<=8.0, 13.0<=l<=18.0 and i+j+k+l=100. As a result, the magnetic material for the magnetic head having the excellent magnetic permeability, coercive force and the high saturation magnetism is obtd. |
