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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH06326152(A)
申请公布日期
1994.11.25
申请号
JP19930112998
申请日期
1993.05.14
申请人
SHINKO ELECTRIC IND CO LTD;APIC YAMADA KK
发明人
UCHIDA HIROFUMI;YAMAGUCHI TATSUYOSHI
分类号
H01L21/56;H01L21/60;H01L23/28;H01L23/50;(IPC1-7):H01L21/60
主分类号
H01L21/56
代理机构
代理人
主权项
地址
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