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发明名称
ION IMPLANTING DEVICE
摘要
申请公布号
JPH06325724(A)
申请公布日期
1994.11.25
申请号
JP19930110214
申请日期
1993.05.12
申请人
HITACHI LTD;HITACHI INSTR ENG CO LTD
发明人
HASHIMOTO YOJI
分类号
C23C14/48;H01J37/06;H01J37/22;H01J37/317;H01L21/265;(IPC1-7):H01J37/317
主分类号
C23C14/48
代理机构
代理人
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