UPTIME RATIO TOTALIZATION SYSTEM OF SEMICONDUCTOR MANUFACTURING EQUIPMENT

摘要

PURPOSE:To provide an uptime ratio totalization system of a semiconductor equipment capable of effectively using the entire facility by a method wherein the uptime ratio of the semiconductor equipment is raised as occasion demands. CONSTITUTION:This system comprises semiconductor equipment 23 having an operation status detecting part 28; and a controller 21 having an uptime ratio managing part 25 into which working status detecting signals derived from the operation status detecting part 28 are inputted. The uptime ratio managing part 25 finds the uptime ratio of the semiconductor equipment based on the operation status detecting signals derived from the operation status detecting part 28 and also outputs alarm signals into an operating board 22 when the uptime ratio is below a specific value.