FORMATION METHOD FOR THIN FILM IN SEMICONDUCTOR DEVICE,申请号JP19930086366-传众专利搜索

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发明名称	FORMATION METHOD FOR THIN FILM IN SEMICONDUCTOR DEVICE
摘要
申请公布号	JPH06326026(A)	申请公布日期	1994.11.25
申请号	JP19930086366	申请日期	1993.04.13
申请人	APPLIED MATERIALS INC	发明人	MUTSUHIRA KATSUYUKI
分类号	C23F4/00;C23C14/34;C23C16/40;C23C16/509;C23C16/511;H01L21/205;H01L21/316;(IPC1-7):H01L21/205	主分类号	C23F4/00
代理机构		代理人
主权项
地址

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