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发明名称
CLEANING APPARATUS
摘要
申请公布号
JPH06326072(A)
申请公布日期
1994.11.25
申请号
JP19930136975
申请日期
1993.05.17
申请人
SONY CORP
发明人
SUGIMOTO EMI;SATO SHINICHI;AIBA TAKESHI
分类号
B08B3/10;H01L21/304;(IPC1-7):H01L21/304
主分类号
B08B3/10
代理机构
代理人
主权项
地址
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