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发明名称
LOW-TEMPERATURE TREATMENT APPARATUS
摘要
申请公布号
JPH06326056(A)
申请公布日期
1994.11.25
申请号
JP19910089577
申请日期
1991.03.28
申请人
SONY CORP
发明人
SATO JUNICHI
分类号
C23C16/44;C23C16/455;C23F4/00;H01L21/205;H01L21/302;H01L21/3065;(IPC1-7):H01L21/302
主分类号
C23C16/44
代理机构
代理人
主权项
地址
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