ETCHING METHOD OF COPPER THIN FILM,申请号JP19930113542-传众专利搜索

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发明名称	ETCHING METHOD OF COPPER THIN FILM
摘要
申请公布号	JPH06326059(A)	申请公布日期	1994.11.25
申请号	JP19930113542	申请日期	1993.05.17
申请人	FUJITSU LTD	发明人	HIROTA TAKATOSHI
分类号	H01L21/302;H01L21/3065;H01L21/3205;H01L21/3213;H01L23/52;(IPC1-7):H01L21/302;H01L21/320	主分类号	H01L21/302
代理机构		代理人
主权项
地址

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