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发明名称
THIN FILM AND ITS MANUFACTURE
摘要
申请公布号
JPH06326327(A)
申请公布日期
1994.11.25
申请号
JP19930114426
申请日期
1993.05.17
申请人
NEC CORP
发明人
SUZUKI YOSHIYUKI
分类号
H01L21/316;H01L21/318;H01L21/8247;H01L29/788;H01L29/792;(IPC1-7):H01L29/788
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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