Method for microscopically measuring the surface structure of an object

摘要

This method is used for microscopically measuring the surface structure of an object with the aid of at least one lens. In this case, surface points Pi of the object which are of interest are sharply and successively imaged, while keeping the image distance constant, from two different lines R, R' of sight, and the respective viewpoint coordinates xi, yi and x'i, y'i, respectively, are measured. The object space coordinates ui, vi, wi of the surface points Pi are then determined from the associated image point coordinates by using a transformation matrix T. The latter can be determined with the aid of three reference points of known position in the object space and of their image point coordinates obtained from the same two lines R, R' of sight. <IMAGE>