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发明名称
Verfahren und Vorrichtung zum Reinigen und Trocknen mittels Dampf
摘要
申请公布号
DE3937864(C2)
申请公布日期
1994.11.24
申请号
DE19893937864
申请日期
1989.11.14
申请人
CANON K.K., TOKIO/TOKYO, JP
发明人
SHIBUYA, YUZO, TOKIO/TOKYO, JP;NAKAMURA, RYOZO, CHIGASAKI, KANAGAWA, JP
分类号
H01L21/304;H01L21/00;(IPC1-7):B08B3/00
主分类号
H01L21/304
代理机构
代理人
主权项
地址
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