Microscopic grinding method and microscopic grinding device.

摘要

A microscopic grinding device grinds a workpiece (W) at ultrahigh precision with the use of magnetic grinding fluid (M) actuated microscopically in three dimensional directions by Z- and XY-axis actuators (20, 22). The magnetic grinding fluid (M) is magnetically supported between a grinding member (24,26) and the workpiece (W) by the magnetic field. Because magnetic field is generated to form a magnetic circuit within the device itself where no workpiece is necessary to form the magnetic circuit, the device can be used with equal results even with workpieces made from non-magnetic material. The pressure applied to the workpiece (W) by the grinding member (24,26) via the magnetic grinding fluid (M) is detected by a load cell (60) for feeding back a signal indicative of the detected pressure to the controller (61). The controller (61) controls the actuators (20, 22) to actuate the grinding member (22) such that the pressure applied from the grinding member (24, 26), via the magnetic fluid (M), to the workpiece (W) is maintained within a predetermined range.