Pressure transducers with diamond diaphragms and optical deflection detection means

摘要

A pressure transducer comprises a polycrystalline diamond diaphragm (39), produced by use of a chemical vapour deposition technique, on a support (33). The diaphragm (39) can deflect in response to variations in pressure. A single optical fibre interferometer (36, 32) is used for detecting and measuring the deflection of the diaphragm (39) (FIG. 3).