发明名称 Coated substrate utilizing composition including selected phenolic derivatives of 4-(4-hydroxyphenyl)-cyclohexanone as sensitivity enhancers
摘要 A radiation-sensitive composition comprising an admixture in a solvent of: at least one alkali-soluble binder resin, at least one photoactive compound and an effective sensitivity enhancing amount of at least one compound of formula (I): <IMAGE> (I) wherein each R is individually selected from the group consisting of hydrogen and a lower alkyl group having 1-4 carbon atoms and each n is 0, 1, or 2; the amount of said binder resin being about 60 to 95% by weight, the amount of said photoactive component being about 5% to about 40% by weight, based on the total solids content of said radiation-sensitive composition.
申请公布号 US5366843(A) 申请公布日期 1994.11.22
申请号 US19940236605 申请日期 1994.05.02
申请人 OCG MICROELECTRONIC MATERIALS, INC. 发明人 JEFFRIES, III, ALFRED T.
分类号 C07C39/16;C07C39/17;G03F7/022;G03F7/039;(IPC1-7):G03F7/023;G03F7/09 主分类号 C07C39/16
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