| 摘要 |
A microminiature vacuum tube includes a single crystal semiconductor substrate having opposed first and second surfaces; a V-shaped groove extending into the substrate from the first surface; an aperture extending into the substrate from the second surface and intersecting the V-shaped groove; an electron-emitting material disposed on the substrate in the V-shaped groove, extending into the aperture, and having a sharp edge in the aperture; and a first insulating layer, a metal gate layer, a second insulating layer, and a metal anode layer successively disposed on the second surface of the substrate adjacent the aperture and spaced from the sharp edge of the electron-emitting material.
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