Sondeneinheit, Betriebsverfahren und Rastervorrichtung zur Feststellung eines Tunnelstromes mit dieser Sonde.,申请号DE1989615940T-传众专利搜索

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发明名称	Sondeneinheit, Betriebsverfahren und Rastervorrichtung zur Feststellung eines Tunnelstromes mit dieser Sonde.
摘要
申请公布号	DE68915940(T2)	申请公布日期	1994.11.17
申请号	DE1989615940T	申请日期	1989.11.06
申请人	CANON K.K., TOKIO/TOKYO, JP	发明人	NOSE, HIROYASU, ZAMA-SHI KANAGAWA-KEN, JP;TAKAMATSU, OSAMU, ATSUGI-SHI KANAGAWA-KEN, JP;MIYAZAKI, TOSHIHIKO, HIRATSUKA-SHI KANAGAWA-KEN, JP;KAWASE, TOSHIMITSU, ATSUGI-SHI KANAGAWA-KEN, JP
分类号	G01B7/34;G01B21/30;G01N27/00;G01N37/00;G01Q10/04;G01Q60/10;G01Q80/00;G11B9/00;G11B9/14;H01J37/252;H01J37/28;H02N2/00;(IPC1-7):G01N27/00	主分类号	G01B7/34
代理机构		代理人
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