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发明名称
摘要
申请公布号
JPH0693004(B2)
申请公布日期
1994.11.16
申请号
JP19860301950
申请日期
1986.12.17
申请人
发明人
分类号
G01R31/28;H01L21/822;H01L27/04;(IPC1-7):G01R31/28
主分类号
G01R31/28
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代理人
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