发明名称 Method of drilling vias and through holes
摘要 Disclosed is a method of producing vias and through holes through a metal laminate. The laminate is a multi-layer, for example, a trilayer of a relatively hard metal between two layers of a relatively soft metal. The method includes the steps of first etching a clearance hole through the soft metal on one side of the trilayer laminate, followed by partially etching the hard metal layer. Next, drilling the remaining thickness of the hard metal, and drilling through the second layer of soft metal.
申请公布号 US5363553(A) 申请公布日期 1994.11.15
申请号 US19930098085 申请日期 1993.07.27
申请人 INTERNATIONAL BUSINESS MACHINES, INC. 发明人 EDWARDS, ROBERT D.;EGITTO, FRANK D.;GALL, THOMAS P.;GURSKY, PAUL S.;HOUSER, DAVID E.;KAMPERMAN, JAMES S.;WRENNER, WARREN R.
分类号 H05K3/00;H05K3/44;(IPC1-7):H01K3/10 主分类号 H05K3/00
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