发明名称 Uniaxial thin film structures formed from oriented bilayers and multilayers
摘要 A method for producing oriented, intermetallic, thin film structures having uniaxial magnetic, electronic, optical, and mechanical properties. Artificial superlattices (10) are assembled by sputter deposition of alternating layers of the component metals of the target intermetallic compound on an aligned substrate (16). Either single crystal substrates or crystallographically textured substrates may be used to induce alignment of the deposited layers (10, 12) in the method of the present invention. Annealing of the resulting superlattice (10) generates aligned, thin film intermetallic compounds (38) of the component metals at the interfaces (44) of the superlattice (10), the thin film intermetallic compounds having pronounced, uniaxial properties.
申请公布号 US5363794(A) 申请公布日期 1994.11.15
申请号 US19920984888 申请日期 1992.12.02
申请人 THE BOARD OF TRUSTEES OF THE LELAND STANFORD JUNIOR UNIVERSITY 发明人 LAIRSON, BRUCE M.;CLEMENS, BRUCE M.;VISOKAY, MARK R.
分类号 C23C26/00;C30B23/02;(IPC1-7):C30B1/10 主分类号 C23C26/00
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