| 摘要 |
<p>PURPOSE:To provide a wafer transfer box whose inside is kept clean without being influenced by the change in a temperature, in an atmospheric pressure and in the air. CONSTITUTION:Gas gateways 4, 5 are formed in an inside box 3 in which a wafer cassette 2 has been housed, and an outside box 10 in which a cleaning unit 14 constituted of a filter 11 and a fan 12 has been provided at the gas gateway is installed.</p> |
