| 摘要 |
<p>PURPOSE:To provide a wet-treatment technique wherein a large-sized substrate is treated with low contamination, in a cassette-less manner and by a batch system of high production efficiency. CONSTITUTION:A rectangular or square substrate SB housed in a carrier cassette and carried into from a previous process is taken out from the carrier cassette, and it is conveyed and treated in a cassetteless manner. At this time, the substrate SB is tilted in such a way that two adjacent rectangular sides SBa, SBb become tilted lover sides, the two tilted lower sides are supported and conveyed in a suspended state, the substrate is transferred and held on a substrate holding stand 50 inside a treatment tank, and the substrate is wet- treated. Thereby, the rectangular or square large-sized substrate SB can be treated by a simple constitution, in a cassetteless manner and by a batch system.</p> |
