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发明名称
FORMATION OF DIFFRACTION GRATING
摘要
申请公布号
JPH06317704(A)
申请公布日期
1994.11.15
申请号
JP19900409794
申请日期
1990.12.10
申请人
CANON INC
发明人
OGURI NOBUAKI
分类号
C23F1/00;C23F4/00;G02B5/18;G02B6/34;G03F7/00;(IPC1-7):G02B5/18
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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