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发明名称
SUBSTRATE FOR SEMICONDUCTOR THERMOSTATIC ACCELERATION TEST DEVICE
摘要
申请公布号
JPH06317630(A)
申请公布日期
1994.11.15
申请号
JP19930105513
申请日期
1993.05.06
申请人
MITSUBISHI ELECTRIC CORP
发明人
SAWADA KEIICHI
分类号
G01R31/26;G01R31/28;(IPC1-7):G01R31/26
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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