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发明名称
METAL COMPOSITE PARTS, PRODUCTION THEREOF AND SEMICONDUCTOR EQUIPMENT
摘要
申请公布号
JPH06316707(A)
申请公布日期
1994.11.15
申请号
JP19930296233
申请日期
1993.11.26
申请人
TOKYO TUNGSTEN CO LTD
发明人
ARIKAWA TADASHI
分类号
B22F3/24;H01L23/06;H01L23/12;H01L23/373;(IPC1-7):B22F3/24
主分类号
B22F3/24
代理机构
代理人
主权项
地址
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