发明名称 SEMICONDUCTOR DEVICE
摘要 PURPOSE:To provide a semiconductor device having a wiring structure which can suppress an increase in the delay time in a wiring passing a memory cell region even when a cell size is made small. CONSTITUTION:Wirings 3, 7 provided with a prescribed length are formed on a semiconductor substrate 10. A wiring 1 whose length is longer than that of those wirings is formed on the wirings via a layer insulating film 14, and the width of the wiring 1 is made large. Since the wiring resistance becomes low, the delay time of each wiring can be made effectively small. This semiconductor device is used as a semiconductor memory which selects a cell by a hierarchical structure of a dual line system or the like.
申请公布号 JPH06318645(A) 申请公布日期 1994.11.15
申请号 JP19930128184 申请日期 1993.05.01
申请人 TOSHIBA CORP 发明人 HARIMA TAKAYUKI
分类号 H01L21/82;G11C5/06;G11C11/401;G11C11/407;G11C11/412;H01L21/768;H01L21/8244;H01L23/522;H01L27/10;H01L27/11 主分类号 H01L21/82
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