Light-sensitive composition

摘要

A positive-working light-sensitive composition whose solubility in a developer is increased by irradiation of light, which comprises: (a) a vinyl ether compound having at least one group represented by the following formula (A); (A) wherein R3 represents a linear or branched alkylene group having 1 to 10 carbon atoms and n represents an integer of 0 or 1; (b) a compound capable of being decomposed by irradiation of an actinic light ray or a radiant ray and releasing an acid; and (c) an alkali-soluble polymer, the light-sensitive composition having high sensitivity to light and permitting the use of light of a wide wavelength range.