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发明名称
Anordning og fremgangsmåte for styring av strömmen av halvlederskiver gjennom en halvlederskive-prosessinnretning
摘要
申请公布号
NO944342(D0)
申请公布日期
1994.11.14
申请号
NO19940004342
申请日期
1994.11.14
申请人
HUGHES AIRCRAFT CO
发明人
POULTNEY, SHERMAN K.;MUMOLA, PETER B.;PRUSAK, JOSEPH P.;GARDOPEE, GEORGE J.;MCHUGH, THOMAS J.
分类号
H01L21/302;H01L21/00;H01L21/02;H01L21/306;H01L21/677;(IPC1-7):H01L
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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