,申请号JP19900071079-传众专利搜索

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发明名称
摘要
申请公布号	JPH0690114(B2)	申请公布日期	1994.11.14
申请号	JP19900071079	申请日期	1990.03.20
申请人		发明人
分类号	G01R31/26;G01J1/00;G01M11/00;H01L27/14;(IPC1-7):G01M11/00	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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