Method for producing sensors, and sensor

摘要

A method for producing sensors is proposed, the starting point of which is a laminated plate (5) having two monocrystalline silicon layers (1, 2) and an interposed etching layer (3). The upper silicon layer (1) is structured by forming trenches (4). By etching the etching layer (3) under part of the silicon layer (1) thus structured, it is possible to obtain sensor structures, for example a flexural beam (30) which is used in an acceleration sensor (Figure 8).