VORRICHTUNG ZUM EINSEITIGEN ÄTZEN EINER HALBLEITERSCHEIBE.,申请号DE19915003186-传众专利搜索

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发明名称	VORRICHTUNG ZUM EINSEITIGEN ÄTZEN EINER HALBLEITERSCHEIBE.
摘要
申请公布号	DE59103186(D1)	申请公布日期	1994.11.10
申请号	DE19915003186	申请日期	1991.07.02
申请人	ROBERT BOSCH GMBH, 70469 STUTTGART, DE	发明人	KUMMER, NILS, D-7140 LUDWIGSBURG, DE;MAREK, JIRI, D-7410 REUTLINGEN, DE;WILLMANN, MARTIN, D-7410 REUTLINGEN, DE;FINDLER, GUENTHER, D-7000 STUTTGART 80, DE
分类号	H01L21/00;(IPC1-7):H01L21/00	主分类号	H01L21/00
代理机构		代理人
主权项
地址

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