发明名称 |
A preparation method of selective growth silicon layer doped with impurities. |
摘要 |
<p>A semiconductor substrate (31) having a surface region of P type and a surface region of N type is formed, then an insulating membrane is formed on the semiconductor substrate (31). The first contact hole which is formed in said region of P type and the second contact hole which is connected to said region of n type are formed by the same process to said insulating membrane. Non-doped silicon layer is grown in said first and second contact holes (35) by the same selective growth process, in a single reactive furnace. A diffuse source layer (37) containing impurities of P type is formed on said first contact hole and a diffuse source layer containing impurities of N type on said second contact hole. Impurities are diffused from said diffuse layers (37, 38) to said silicon layers (36), and said diffuse source layer is then removed. A metal wire layer is formed by connecting it to said silicon layer.</p> |
申请公布号 |
EP0393215(B1) |
申请公布日期 |
1994.11.09 |
申请号 |
EP19890106905 |
申请日期 |
1989.04.18 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
SAMATA, SHUICHI INTELLECTUAL PROPERTY DIV.;MATSUSHITA, YOSHIAKI INTELLECTUAL PROPERTY DIV. |
分类号 |
H01L21/285;H01L21/768;(IPC1-7):H01L21/60;H01L21/20;H01L21/90 |
主分类号 |
H01L21/285 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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