| 摘要 |
PURPOSE:To provide an optical microscope allowing correcting work by laser beams and its confirmation work to be performed speedily and efficiently. CONSTITUTION:When a start signal is supplied, prior to laser emission from a laser machining optical system 30B, a movable lens-barrel 9 is moved up through focus position adjusting mechanism 18 on the basis of the offset quantity stored in a memory so that the focus position of the laser machining optical system 30B coincides with an inspection object. After laser emission, the movable lens-barrel 9 is moved down through the focus position adjusting mechanism 18 on the basis of the offset quantity so that the focus position of an observation optical system 30A coincides with the inspection object. Accordingly, there is no need to move a microscope unit vertically to adjust a focus position every switching operation time as in the existing way so as to be efficient. |
