| 摘要 |
PURPOSE:To make it possible to regulate and control the exhaust quantity of inert gas to the irreducible minimum quantity by freely adjusting the exhaust quantity of inert gas by a method wherein an air-sucking path is provided halfway on an inert gas exhaust path or on the sucking side of an exhaust fan, and a flow rate controlling ON-OFF valve on the sucking path. CONSTITUTION:Both of the inert gas in the vicinity of a lead frame A in a heat-drying oven 1, and the air from an intaking path are exhausted by an exhaust fan 8. Then, when the sucking quantity of the air from the air intaking path 10 is decreased by closing the ON-OFF valve located on the air intaking path 10, the displacement of the inert gas in the vicinity of the lead frame A increases, and when the intake quantity of air is increased by opening the ON-OFF valve 12, the exhaust quantity of inert gas decreases. Accordingly, the exhaust quantity of the inert gas in the vicinity of the lead frame can be adjusted by the ON-OFF valve 12 without decreasing the intake quantity to the exhaust fan. |
