发明名称 Method for determining absolute reflectance of a material in the ultraviolet range
摘要 A method for determining a value of absolute reflectance of a material at [a predetermined] any wavelength, in the ultraviolet range from its measured reflectance which includes system losses contributed by optics, illumination sources, detectors, etc. The method involves the measurement of reflectance from a known material such as single crystal silicon whose absolute reflectance is well known, dividing the measured value by the absolute value to obtain a system efficiency coefficient at the known wavelength and then, without changing the illumination or optics, measuring the reflectance of the unknown material and applying this coefficient to this measured value to obtain its absolute value.
申请公布号 USRE34783(E) 申请公布日期 1994.11.08
申请号 US19930111298 申请日期 1993.08.23
申请人 NANOMETRICS INCORPORATED 发明人 COATES, VINCENT J.
分类号 G01N21/33;G01N21/55;(IPC1-7):G01J1/42 主分类号 G01N21/33
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