CANTILEVER TYPE ACTUATOR, CANTILEVER TYPE PROBE, AND SCANNING TUNNELING MICROSCOPE AND INFORMATION PROCESSOR USING THESE ACTUATOR AND PROBE

摘要

PURPOSE:To provide a cantilever type actuator with a stable characteristic as well as with desirable controllability to obtain large displacement quantity so as to be used for a scanning tunneling microscope, an information processor or the like with this scanning tunneling microscope applied thereto. CONSTITUTION:In a cantilever type actuator, a cantilever 2 having a pair of coil like electrode layers 4, 6 at the upper and lower parts of an insulating layer 5 is formed on a base 1, and the electrode layers 4, 7 are electrically connected to each other through a through hole 6 to form one coil.