发明名称 IC CHIP HANDLING DEVICE
摘要 <p>PURPOSE:To make it possible to peel off an IC chip from a dicing tape in a reliable and stable manner, and also to improve quality, yield of production and efficiency of device without expanding a dicing tape and without damaging the dicing tape and IC chip. CONSTITUTION:The IC chip on a dicing table 2 is pushed up by the needle 4 arranged in a freely advancing or retreating manner in the pepper pot 7 which is pressed to the rear surface of the dicing table, and the IC chip 1 is picked up by the collet from the upper part of the needle 4. The pepper pot is formed into a conical trapezoid shape having the tip face 7a narrower than the bottom face of the IC chip, it is arranged in a vertically moving state, and the IC chip on the dicing table is pushed up by the pepper pot.</p>
申请公布号 JPH06314709(A) 申请公布日期 1994.11.08
申请号 JP19930125475 申请日期 1993.04.28
申请人 MITSUMI ELECTRIC CO LTD 发明人 SAWAMOTO SHUICHI
分类号 H01L21/52;H01L21/301;H01L21/67;H01L21/68;H01L21/78;(IPC1-7):H01L21/52 主分类号 H01L21/52
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