| 摘要 |
<p>PURPOSE:To enhance an aligning accuracy in the case of laminating by bringing a vertex of a protrusion of a first silicon board into coincidence with a lowermost part of a recess of a second board, and bringing surfaces formed with the protrusion and the recess of both the boards into close contact with each other. CONSTITUTION:A first board 202 and a second board 402 are mounted at and adhered to an aligning and adhering unit. In order to adhere them, the board 202 is fixed to a board fixing member 501, and the board 402 is fixed to a board fixing member 502. Then, relative positions of the boards 202 and 402 are so regulated that marker images of both objective lenses 503 and 505 are superposed and marker images of both objective lenses 504 and 506 are superposed. After such relative alignments, the boards 202 and 402 are made to approach, pressurized, and a tunnel current reading tip 407 is adhered to the board 202 and an adhesive layer 306.</p> |
