发明名称 |
Apparatus for manufacturing a semiconductor device |
摘要 |
A dispenser unit is provided on one side of a conveying rail and a wafer is provided on the other side of the conveying rail. A tube is attached at one end to the dispensing unit and at the other end to a syringe. First and second shafts are attached at their base ends to the dispensing unit. A satellite roller and movable roller are mounted on the forward ends of the first and second shafts. The satellite roller and movable roller are mounted such that they are rotatable. A movable mechanism is mounted on the dispensing unit to move a semiconductor element from a wafer onto a lead frame. The movable roller is moved to coat a bonding agent on a rear surface of the semiconductor element.
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申请公布号 |
US5362354(A) |
申请公布日期 |
1994.11.08 |
申请号 |
US19930102758 |
申请日期 |
1993.08.06 |
申请人 |
KABUSHIKI KAISHA TOSHIBA |
发明人 |
OKURA, HIROYUKI;ISHIKAWA, TOSHIMITSU |
分类号 |
B05C1/02;B05C1/08;B05C13/02;H01L21/00;H01L21/52;(IPC1-7):B05C1/08 |
主分类号 |
B05C1/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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